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Perspectives of the VGF growth process for the preparation of low-defect InP substrate crystals

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3 Author(s)
Muller, G. ; Inst. fuer Werkstoffwissenschaften, Erlangen-Nurnberg Univ., Germany ; Hofmann, D. ; Schafer, N.

The current status of LEC (liquid encapsulated Czochralski)-type growth processes and vertical gradient freeze (VGF)-growth of InP substrate crystals is reviewed. The twinning problem presently limiting the VGF potential is discussed and strategies to overcome this defect are considered. A new type of VGF multizone furnace is introduced. VGF processing under defined thermal and constitutional boundary conditions in this apparatus based on a recently developed global numerical model offers new perspectives for the growth of low-defect InP single crystals

Published in:

Indium Phosphide and Related Materials, 1993. Conference Proceedings., Fifth International Conference on

Date of Conference:

19-22 Apr 1993