The authors have developed a double crucible liquid encapsulated Czochralski (LEC) method with a continuous supply of solute elements. The controllability of the supply of solute elements can be improved by this method. A 5 cm long InGaAs ternary bulk crystal has been grown at a constant temperature by the LEC method with a supply of only GaAs to growth melt. The X-ray, electrical and optical results imply that the quality of the InGaAs bulk crystals is as high as the LEC grown GaAs crystals on the market
Published in:
Indium Phosphide and Related Materials, 1993. Conference Proceedings., Fifth International Conference on
Date of Conference: 19-22 Apr 1993