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Improved reliability of amorphous silicon anti-fuse used in high speed FPGA

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3 Author(s)
Nariani, S.R. ; VLSI Technol. Inc., San Jose, CA, USA ; Gabriel, Calvin T. ; Jain, V.

A programmable anti-fuse, using amorphous silicon between levels of metal, is studied. The step coverage of the a-Si has the most significant impact on the anti-fuse characteristics. Other critical process parameters are also identified. The anti-fuse architecture is optimized to enhance its performance, yield and reliability with built-in process robustness

Published in:

Custom Integrated Circuits Conference, 1994., Proceedings of the IEEE 1994

Date of Conference:

1-4 May 1994