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Browse Journals & Magazines > Instrumentation and Measureme ...> Volume:44 Issue:2 Help

All-niobium process for Josephson series array circuits

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3 Author(s)
Se Il Park ; Electr. Group, Korea Res. Inst. of Standards & Sci., Taejon, South Korea ; Kyu-Tae Kim ; Rae Duk Lee

We have developed a new fabrication process for integrated Nb/Al 2O3/Nb Josephson series arrays using the selective niobium anodization process (SNAP), the image reversal technique (IRT) and lift-off. To avoid chaotic behavior, the critical current of the array was decreased by post-fabrication annealing or the in situ multilayer oxidation process. In the frequency range 70-100 GHz, the array containing 2520 junctions produced stable quantized voltage steps up to 2 V with step widths of 40-100 μA and stability times of more than 4 h

Published in:
Instrumentation and Measurement, IEEE Transactions on  (Volume:44 ,  Issue: 2 )

Date of Publication: Apr 1995

Page(s):
241 - 244
ISSN :
0018-9456
INSPEC Accession Number:
4953370
Digital Object Identifier :
10.1109/19.377821
Product Type:
Journals & Magazines
Date of Current Version :
06 August 2002
Issue Date :
Apr 1995
Sponsored by :
IEEE Instrumentation and Measurement Society

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