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Silicon thermooptical micromodulator with 700-kHz -3-dB bandwidth

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4 Author(s)
Cocorullo, G. ; Consiglio Naz. delle Ricerche, Istituto di Ricerca per lElettromag., Napoli, Italy ; Iodice, M. ; Rendina, I. ; Sarro, P.M.

A silicon Fabry-Perot waveguide modulator, operating at the fiber optic communication wavelengths of 1.3 and 1.55 /spl mu/m, has been entirely fabricated using microelectronic techniques. The planar optical cavity has been defined by plasma etching and has a length of 100 /spl mu/m. The device, based on the thermooptic effect, is electrically driven and exhibits a maximum modulation depths of 60%. The measured -3 dB bandwidth is 700 kHz, which is by far the best result ever reported, to our knowledge, for thermooptic effect based modulators.<>

Published in:

Photonics Technology Letters, IEEE  (Volume:7 ,  Issue: 4 )

Date of Publication:

April 1995

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