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Influence of plasma extraction on a cylindrical low-pressure RF discharge: a PIC-MC study

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2 Author(s)
Krimke, Ralf ; Fachbereich Phys., Kaiserslautern Univ., Germany ; Urbassek, Herbert M.

A model is presented for plasma extraction from a cylindrical RF discharge. Even though the extraction geometry is two-dimensional, the model proposed here allows to discuss extraction in a one-dimensional geometry. Specific results are obtained for a low-pressure RF discharge between cylindrical electrodes with a high asymmetry. These are calculated with the help of a PIC-MC computer simulation. The influence of extraction on the plasma characteristics, the ionization efficiency, and the influence of an axial magnetic field are calculated and discussed

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Plasma Science, IEEE Transactions on  (Volume:23 ,  Issue: 1 )