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Millimeter-wave on-wafer waveform and network measurements using active probes

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6 Author(s)
Yu, R.Y. ; Dept. of Electr. & Comput. Eng., California Univ., Santa Barbara, CA, USA ; Reddy, M. ; Pusl, J. ; Allen, S.T.
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We have fabricated active probes for on-wafer waveform and network measurements. The probes incorporate GaAs nonlinear transmission line (NLTL) based network analyzer (NWA) integrated circuits and low-loss quartz coplanar-waveguide probe tips. The active probes show step response falltimes of 2.7 ps when excited by a 0.7-ps falltime input, Using these active probes, we demonstrate both waveform measurements with 2.7-ps risetime and network measurements to 200 GHz. We discuss the probe tip and NWA IC design, the hybrid assembly and mechanical design, and system design considerations. On-wafer waveform and S-parameter measurements of monolithic millimeter-wave integrated circuits are demonstrated

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Microwave Theory and Techniques, IEEE Transactions on  (Volume:43 ,  Issue: 4 )