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Scanning microellipsometry for extraction of true topography

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3 Author(s)
Holmes, R.D. ; Dept. of Electr. & Electron. Eng., Nottingham Univ., UK ; See, C.W. ; Somekh, M.G.

The amplitude and phase distributions at the back focal plane of a scanning interferometer are used to determine the phase of the optical reflection coefficient. This value for phase change is then used to correct the overall phase measured with the interferometer, so that pure topography measurement is achieved

Published in:

Electronics Letters  (Volume:31 ,  Issue: 5 )

Date of Publication:

2 Mar 1995

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