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Electroacoustic model for electrostatic ultrasonic transducers with V-grooved backplates

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4 Author(s)
Mattila, P. ; VTT Tech. Res. Center, Tampere, Finland ; Tsuzuki, F. ; Vaataja, H. ; Sasaki, K.

Capacitive ultrasonic transducers are widely used to generate airborne ultrasound. This paper presents an equivalent circuit for an electrostatic transducer with a V-grooved backplate. The comparison between simulation results and measurements on a prototype transducer shows that the model gives reliable results. This model is useful in many applications, for example to simulate sensors in a robot and to design ultrasonic transducer systems.<>

Published in:

Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on  (Volume:42 ,  Issue: 1 )