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An automated electro-optic probing system for ultra-high-speed IC's

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2 Author(s)
M. Shinagawa ; NTT LSI Labs., Kanagawa, Japan ; T. Nagatsuma

This paper describes an automated optical probing system based on external electro-optic sampling for the internal diagnoses of ultra-high-speed IC's. A workstation-controlled environment, automatic probe positioner, and module-based system architecture make the system easy to use, and improve measurement accuracy and reproducibility. Voltage sensitivity is routinely obtained on an order of 1 mV/√(Hz) at frequencies up to 70 GHz. The system has been successfully applied to the internal-node measurement of on-wafer digital IC's operating at 20 Gb/s

Published in:

IEEE Transactions on Instrumentation and Measurement  (Volume:43 ,  Issue: 6 )