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Browse Journals & Magazines > Microwave Theory and Techniqu ...> Volume:36 Issue:8 Help

The effects of a dielectric capacitor layer and metallization on the propagation parameters of coplanar waveguide for MMIC

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4 Author(s)
Delrue, R. ; Univ. des Sci. et Tech. de Lille, Flandres Artois, Villeneuve d''Ascq, France ; Seguinot, C. ; Pribetich, P. ; Kennis, P.

The study of coupling phenomena between lines laid on semiconductor substrates in monolithic microwave integrated circuit (MMIC) technologies and the determination of propagation effects on power FETs require the characterization of lines with micron transversal widths. For such lines, the influence of metallization thickness and dielectric cap layer on propagation properties can not be neglected. These effects are characterized for the case of coplanar lines laid on semiconductor substrates. The mathematical development used and the results obtained by a numerical technique are presented

Published in:
Microwave Theory and Techniques, IEEE Transactions on  (Volume:36 ,  Issue: 8 )

Date of Publication: Aug 1988

Page(s):
1285 - 1288
ISSN :
0018-9480
INSPEC Accession Number:
3232640
Digital Object Identifier :
10.1109/22.3671
Product Type:
Journals & Magazines
Date of Current Version :
06 August 2002
Issue Date :
Aug 1988
Sponsored by :
IEEE Microwave Theory and Techniques Society

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