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GaAs micromachined widely tunable Fabry-Perot filters

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5 Author(s)
Vail, E.C. ; Edward L. Ginzton Lab., Stanford Univ., CA, USA ; Wu, M.S. ; Li, G.S. ; Eng, L.
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The authors present a surface-normal micromachined GaAs Fabry-Perot filter with 70 nm of continuous tuning, 19 dB extinction ratio, 4.9 V of tuning voltage, and 50 pA tuning current. The device is polarisation insensitive, can be fabricated into two-dimensional arrays, is easy to couple into fibre, and requires only two masks with no critical alignments

Published in:

Electronics Letters  (Volume:31 ,  Issue: 3 )