By Topic

Analysis of closed-loop control of parallel-plate electrostatic microgrippers

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

2 Author(s)
Chu, P.B. ; Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA ; Pister, K.S.J.

A design of a high-force-output large-deflection parallel-plate electrostatically actuated microgripper is described. This design uses polysilicon as a structural material and may be fabricated using an IC-based surface machining process. This paper shows that by using a position feedback controller, the microgripper can be stabilized in theory, which is supported by computer simulations. Preliminary data from fabricated micro-grippers also supports the mathematical model for the open loop system, although the pull-in voltages (50 V to 100 V for gaps of 80 to 100 μm2) are generally lower than predicted ones, probably due to the inherent instability of the electrostatic system. Further experiments are in progress to evaluate the open-loop system and the closed-loop system

Published in:

Robotics and Automation, 1994. Proceedings., 1994 IEEE International Conference on

Date of Conference:

8-13 May 1994