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Efficient establishment of a fuzzy logic model for process modeling and control

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3 Author(s)
Jian Tan ; Dept. of Mech. Eng., Colorado Univ., Boulder, CO, USA ; Hong Xie ; Yung-Cheng Lee

Fuzzy logic modeling using internal and membership functions is a promising technique for the modeling and control of semiconductor manufacturing and packaging processes. To simplify its implementation procedure, a fuzzy logic model needs to be established with the minimum user interference. An algorithm with two major steps has been proposed and demonstrated for the efficient model establishment The first step develops intermediate fuzzy logic models with different numbers of membership functions assigned to each input variable. The number is one for the simplest model, and is increased one by one according to the pre-defined sequence and pathfinding criteria for more complex models, The second step stops the incremental procedure when the stopping criteria are met. The criteria are the multiple correlation factors R 2 based on the training and the testing data. The algorithm's accuracy and efficiency have been demonstrated by testing it with five two-variable, nonlinear functions

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Semiconductor Manufacturing, IEEE Transactions on  (Volume:8 ,  Issue: 1 )