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Current status of the digital micromirror device (DMD) for projection television applications

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1 Author(s)
Hornbeck, L.J. ; Digital Imaging Venture Project, Texas Instrum. Inc., Dallas, TX, USA

This paper describes recent advances in digital micromirror device (DMD) technology for projection television (PTV) applications, including a new device called the hidden hinge DMD with improved optical efficiency and contrast ratio. The DMD is a micromechanical, reflective spatial light modulator monolithically fabricated over a conventional CMOS SRAM address circuit. A 768/spl times/576 pixel array DMD (442,368 mirrors) has been developed for and demonstrated in one-DMD and three-DMD PTV systems having diagonals ranging in size from 42 inches to 13 feet.<>

Published in:

Electron Devices Meeting, 1993. IEDM '93. Technical Digest., International

Date of Conference:

5-8 Dec. 1993