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A microcomputer-efficient algorithm to study the parasitic capacitances associated with high-density single-level interconnections on GaAs-based VLSI is presented and a student-oriented program called PCSIGV is discussed. The algorithm uses the method of moments in conjunction with a Green's function appropriate to the geometry of the interconnections. Results include the fringing fields as well as the effects of shielding due to the presence of the neighboring interconnection lines. PCSIGV has been used to study the dependence of the ground and coupling interconnections capacitances on various interconnection parameters.
Date of Publication: Aug. 1989