Scheduled System Maintenance on May 29th, 2015:
IEEE Xplore will be upgraded between 11:00 AM and 10:00 PM EDT. During this time there may be intermittent impact on performance. We apologize for any inconvenience.
By Topic

1.5 GHz SAW bandpass filter using poly-crystalline diamond

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

8 Author(s)
Shikata, S. ; Res. Labs., Sumitomo Electr. Ind. Ltd., Itami ; Nakahata, H. ; Higaki, K. ; Hachigo, A.
more authors

Due to its high Young modulus, diamond has the highest acoustic wave velocity among all materials and thus it can be expected to be a candidate of the substrate for high frequency surface acoustic wave (SAW) devices. 15 μm thick poly-crystalline diamond deposited on a silicon substrate by hot-filament CVD was used as a substrate. For the piezoelectric material, ZnO film was deposited by RF sputtering. A 1.5 GHz bandpass filter was successfully demonstrated using a 1.5 μm line and space single electrode; additionally a 12.1 dB insertion loss including a 6 dB bi-directional loss was observed. The phase velocity of 8900 m/s and an electro-mechanical coupling constant of 1.76% were obtained for this filter. The propagation loss of this structure was estimated to be 3.9 dB- most of this is presumably losses in ZnO. This loss can be reduced by process refinement of ZnO deposition

Published in:

Ultrasonics Symposium, 1993. Proceedings., IEEE 1993

Date of Conference:

31 Oct-3 Nov 1993