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Characteristics of leaky surface acoustic waves propagating along liquid/layered-substrates and their application to liquid sensor

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6 Author(s)
Furukawa, S. ; Dept. of Comput. Sci. & Electron., Kyushu Inst. of Technol., Fukuoka ; Nomura, T. ; Yasuda, T. ; Nishimura, R.
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We propose SiO2 (fused silica)/(36°rot.Y-X)LiNbO 3 substrate for a viscosity sensor, in which the shear horizontal (SH) component becomes larger than that of the case without SiO2. For glycerin/SiO2 (40 μm)/LiNbO3 the loss due to the viscosity of glycerin is four times larger than that for glycerin/LiNbO3 (30 MHz). Moreover, we show that the SiO2/(128°rot.Y-X)LiNbO3 structure is available as a liquid sensor, although the LiNbO3 substrate (128°rot.Y cut) itself has a small SH component. The origin of the large SH component in the layered substrates is discussed on the basis of the boundary conditions at the interface

Published in:

Ultrasonics Symposium, 1993. Proceedings., IEEE 1993

Date of Conference:

31 Oct-3 Nov 1993