By Topic

Silicon-micromachined gas chromatography system used to separate and detect ammonia and nitrogen dioxide. I. Design, fabrication, and integration of the gas chromatography system

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

2 Author(s)
R. R. Reston ; Sch. of Med., Uniformed Services Univ. of Health Sci., Bethesda, MD, USA ; E. S. Kolesar

A miniature gas chromatography (GC) system was designed and developed using silicon micromachining and integrated circuit (IC) processing techniques. The micromachined gas chromatography (MMGC) system is composed of a miniature sample injector incorporating a 10-μm-long sample loop; a 0.9-m-long, rectangular-shaped (300 μm width and 10 μm height) capillary column coated with a 0.2-μm-thick copper phthalocyanine (CuPc) stationary phase, and a dual-detector scheme based upon a CuPc-coated chemiresistor and a 125-μm-diameter thermal conductivity detector (TCD) bead. Silicon micromachining was employed to fabricate the interface between the sample injector and the GC column, the GC column itself, and the dual-detector cavity. A novel processing technique was developed to sublime a homogeneous CuPc stationary-phase coating on the GC column walls. The complete MMGC system package is approximately 4 in, square and 100 mils (2.5 mm) thick, [96]

Published in:

Journal of Microelectromechanical Systems  (Volume:3 ,  Issue: 4 )