Referenced Items are not available for this document.
A description is given of a noncontact waveform measurement technique for the characterization of high-speed LSI and VLSI circuits using a picosecond photoelectron scanning electron microscope with 5-ps temporal resolution, 0.1-μm spatial resolution, and a voltage resolution of 3 mV/√Hz. The ability of the technique to measure and monitor the internal waveforms and to resolve the different contributions of the delay in the circuit without any loading effect is demonstrated by its application to the full characterization of sub-100-ps silicon bipolar ECL (emitter-coupled logic) circuits
Published in:
Electron Devices, IEEE Transactions on
(Volume:35
,
Issue:
7
)
Date of Publication: Jul 1988
- Page(s):
- 1126 - 1129
- ISSN :
- 0018-9383
- INSPEC Accession Number:
- 3252051
- Digital Object Identifier :
- 10.1109/16.3373
- Date of Current Version :
- 06 August 2002
- Issue Date :
- Jul 1988
- Sponsored by :
- IEEE Electron Devices Society
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