Referenced Items are not available for this document.
New lithography techniques of below 500 A electrode width are proposed. The electrodes are fabricated by using extreme thin anodic oxidation films (AOF) composed using electro-chemical effects as resists. The results show the 750 A width electrode using wet etching techniques and 1000 A using dry etching techniques. The experimental results of unidirectional interdigital transducer (IDT) and 17 GHz-range Surface Acoustic Waves filters are demonstrated using the electrode width of 600 A.<
Published in:
Microwave Symposium Digest, 1994., IEEE MTT-S International
Date of Conference: 23-27 May 1994
- Page(s):
- 1221 - 1224 vol.2
- Meeting Date :
- 23 May 1994-27 May 1994
- ISSN :
- 0149-645X
- Print ISBN:
- 0-7803-1778-5
- INSPEC Accession Number:
- 4800466
- Conference Location :
- San Diego, CA, USA
- Digital Object Identifier :
- 10.1109/MWSYM.1994.335566
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