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Theory, design and operation of surface generated acoustic wave sensors

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3 Author(s)
Vetelino, J.F. ; Lab. for Surface Sci. & Technol., Maine Univ., Orono, ME, USA ; Andle, J.C. ; Falconer, R.S.

Surface generated acoustic waves (SGAW) excited in a piezoelectric medium provide an attractive technology to realize a family of microsensors which are sensitive, portable, cheap and small. In this paper two SGAW microsensors namely, the surface acoustic wave gas sensor and the acoustic plate mode biosensor are described. Results indicate that these sensors are extremely sensitive to the measurand of interest.<>

Published in:
Microwave Symposium Digest, 1994., IEEE MTT-S International

Date of Conference: 23-27 May 1994

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