IEEE.org| IEEE Xplore Digital Library| IEEE Standards| IEEE Spectrum| More Sites

Cart (Loading....) | Create Account | 

Close category search window
Author Searchbeta |  Advanced Search  |  Preferences |  Search Tips  |  More Search Options  
 
Browse Journals & Magazines > Magnetics, IEEE Transactions ...> Volume:30 Issue:6 Help

Silicon micromachined two-dimensional galvano optical scanner

Full Text Sign-In or Purchase

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing! close button
puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Asada, N. ; Tohoku Gakuin Univ., Sendai, Japan ; Matsuki, H. ; Minami, K. ; Esashi, M.

A new two-dimensional galvano optical scanner realized by silicon micromachining is proposed. To realize two-dimensional operation a silicon micromachined gimbal structure was introduced. It is possible to sense rotational angle using electromagnetic coupling between driving coil and fixed detecting coil

Published in:
Magnetics, IEEE Transactions on  (Volume:30 ,  Issue: 6 )

Date of Publication: Nov 1994

Page(s):
4647 - 4649
ISSN :
0018-9464
INSPEC Accession Number:
4860961
Digital Object Identifier :
10.1109/20.334177
Product Type:
Journals & Magazines
Date of Current Version :
06 August 2002
Issue Date :
Nov 1994
Sponsored by :
IEEE Magnetics Society

IEEE Account

Purchase Details

Profile Information

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2013 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.