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Silicon micromachined two-dimensional galvano optical scanner

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4 Author(s)
Asada, N. ; Tohoku Gakuin Univ., Sendai, Japan ; Matsuki, H. ; Minami, K. ; Esashi, M.

A new two-dimensional galvano optical scanner realized by silicon micromachining is proposed. To realize two-dimensional operation a silicon micromachined gimbal structure was introduced. It is possible to sense rotational angle using electromagnetic coupling between driving coil and fixed detecting coil

Published in:

Magnetics, IEEE Transactions on  (Volume:30 ,  Issue: 6 )