Performance of hard DLC protective film prepared by PECVD method for thin film magnetic disk

Performance of a diamondlike carbon (DLC) film prepared by the PECVD method has been investigated as the protective film of a rigid thin film disk. An in-line sputtering PECVD multilayer deposition system was used for preparation of disk samples. The disks were found to be superior to those disks with conventionally sputtered carbon films in many aspects such as high durability against CSS tests, smooth coverage over the irregular points of the magnetic layer, and as a result, good corrosion resistance even at a thickness of 15 nm or less.<
>