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Planarized thin film inductors and capacitors for hybrid integrated circuits made of aluminum and anodic alumina

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1 Author(s)
V. Surganov ; Dept. of Microelectron., Minsk Radio Eng. Inst., Byelorussia

Planarized inductors and capacitors made of aluminum layers by electrochemical anodization technique have been tested in the frequency region of 1 kHz-300 MHz at temperatures of 293-473 K. These microcomponents can be used for high-frequency hybrid integrated circuits

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IEEE Transactions on Components, Packaging, and Manufacturing Technology: Part B  (Volume:17 ,  Issue: 2 )