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Picometre displacement tracking of an optical beam in a silicon Schottky barrier sensor

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2 Author(s)
O'Connor, S.D. ; Div. of Chem., California Inst. of Technol., Pasadena, CA ; Soares, S.F.

An Ni-Si-Ni Schottky barrier sensor is used to sense 0.032 nm (0.064 nm peak-to-peak, 0.023 nm RMS) displacement of an optical beam incident on the sensor. This spatial resolution is more than two orders of magnitude better than any previously reported with a simple solid-state device and approaches interferometric levels

Published in:

Electronics Letters  (Volume:30 ,  Issue: 22 )

Date of Publication:

27 Oct 1994

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