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Engineering a device for electron-beam probing

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1 Author(s)
W. T. Lee ; Schlumberger Technol. ATE, San Jose, CA, USA

The principles of electron-beam probing for diagnostic work are described. Guidelines are presented to help users of electron-beam probe stations optimize their IC design and manufacturing procedures for electron-beam probing. The guidelines cover: observability, maintaining line of sight, direct versus indirect measuring, using test points, accuracy, improving signal-to-noise ratio, reducing crosstalk, maintaining a consistent environment, usability, reducing acquisition time, packaging, and linking with CAD/CAE databases.<>

Published in:

IEEE Design & Test of Computers  (Volume:6 ,  Issue: 3 )