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Batch fabricated thin-film electrodes for stimulation of the central auditory system

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9 Author(s)
Anderson, D.J. ; Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA ; Najafi, K. ; Tanghe, S.J. ; Evans, D.A.
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Silicon micromachining and thin-film technology were used to fabricate iridium stimulating arrays which can be used to excite discrete volumes of the central nervous system. Silicon multichannel probes with thicknesses ranging from 1 to 40 mu m and arbitrary two-dimensional shape can be fabricated using a high-yield, circuit-compatible process. Iridium stimulating sites are shown to have similar characteristics to iridium wire electrodes. Accelerated pulse testing with over eight million 100 mu A biphasic current pulses on 8000 mu m 2 sites demonstrated the long-term stability of iridium and activated iridium sites. In vivo tests were performed in the central auditory pathways to demonstrate neural activation using the devices. These tests show a selective activation both as a function of site separation and site size.

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Biomedical Engineering, IEEE Transactions on  (Volume:36 ,  Issue: 7 )