Cart (Loading....) | Create Account
Close category search window
 

Numerical modeling of glass flow and spin-on planarization

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

1 Author(s)
Leon, F.A. ; Intel Corp., Santa Clara, CA, USA

A model for the flow of phosphosilicate glass (PSG) and borophosphosilicate glass (BPSG) has been developed and integrated into the SAMPLE process simulation program. The physical basis of the model is the deformation of the glass in such a way as to decrease the surface free energy; the kinetics of the deformation are assumed to be controlled by a surface diffusion process. The model is applicable to 2-D and quasi-3-D (cylindrically symmetric) structures. In addition, a related model has been developed for spin-on glass, polyimide, and photoresist. The theory of these models is discussed, and examples of simulations using these models are presented

Published in:

Computer-Aided Design of Integrated Circuits and Systems, IEEE Transactions on  (Volume:7 ,  Issue: 2 )

Date of Publication:

Feb 1988

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.