By Topic

Design considerations for a Gaudi test structure which can be used to determine the optimum focus

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
M. Fallon ; Dept. of Electr. Eng., Edinburgh Univ., UK ; A. J. Walton ; J. T. M. Stevenson ; A. W. S. Ross

A test structure is described which can be used to optimize the focus of wafer steppers. Simulation is used to examine the effect that some of the design parameters have on the sensitivity of the structure. Finally some practical measurements are presented

Published in:

IEEE Transactions on Semiconductor Manufacturing  (Volume:7 ,  Issue: 3 )