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Browse Journals & Magazines > Semiconductor Manufacturing, ...> Volume:7 Issue:3 Help

Design considerations for a Gaudi test structure which can be used to determine the optimum focus

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4 Author(s)
Fallon, M. ; Dept. of Electr. Eng., Edinburgh Univ., UK ; Walton, Anthony J. ; Stevenson, J.T.M. ; Ross, A.

A test structure is described which can be used to optimize the focus of wafer steppers. Simulation is used to examine the effect that some of the design parameters have on the sensitivity of the structure. Finally some practical measurements are presented

Published in:
Semiconductor Manufacturing, IEEE Transactions on  (Volume:7 ,  Issue: 3 )

Date of Publication: Aug 1994

Page(s):
272 - 278
ISSN :
0894-6507
INSPEC Accession Number:
4775854
Digital Object Identifier :
10.1109/66.311329
Product Type:
Journals & Magazines
Date of Current Version :
06 August 2002
Issue Date :
Aug 1994
Sponsored by :
IEEE Components, Packaging and Manufacturing Technology Society

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