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Development of a microprocessor interface to a scanning electron microscope

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3 Author(s)
N. K. L. Raja ; Central Electron. Eng. Res. Inst., Pilani Rajasthan, India ; V. G. Karkare ; S. K. David

The development and applications of a microprocessor interface to a scanning electron microscope (SEM) for SEM image acquisition and electron-beam writing is described. The design considerations and system-related constraints along with necessary modifications to the SEM are presented. Hardware and software optimization is attempted, and the approach is discussed. Some results of applications are presented

Published in:

IEEE Transactions on Instrumentation and Measurement  (Volume:38 ,  Issue: 4 )