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Subμm registration of fiducial marks using machine vision

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2 Author(s)
M. Tichem ; Fac. of Mech. Eng. & Marine Technol., Delft Univ. of Technol., Netherlands ; M. S. Cohen

Subμm registration between circularly symmetric fiducial marks can be achieved simply by finding their centroids by fitting circles to distributed edge positions determined by the second-derivative zero-crossing method. However, because of diffraction fringes, substantial errors originating in the tilt of the microscope optical axis must be minimized. This method is used for laser-fibre alignment tolerance studies

Published in:

IEEE Transactions on Pattern Analysis and Machine Intelligence  (Volume:16 ,  Issue: 8 )