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New shunt wiring technologies for high performance HDTV CCD image sensors

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8 Author(s)
Orihara, K. ; NEC Corp., Sagamihara, Japan ; Minami, K. ; Nakano, T. ; Hatano, K.
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New shunt wiring technologies for HDTV FIT-CCD image sensors have been developed. They include tungsten direct shunt wiring structure. As well as a new layout for tungsten shunt lines and aluminum bus lines. A 1-inch format 2M pixel FIT-CCD image sensor was fabricated using these technologies. A low smear level, less than -110 dB, was achieved at 1 MHz frame shift frequency. Furthermore, a 1.2*10/sup 5/ electron charge handling capability was obtained up to 1.4 MHz frame shift frequency.<>

Published in:

Electron Devices Meeting, 1992. IEDM '92. Technical Digest., International

Date of Conference:

13-16 Dec. 1992

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