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Microwave assisted low temperature solid phase crystallization of ferroelectric thin films

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3 Author(s)
Chen, J. ; Dept. of Electr. Eng., Pennsylvania State Univ., University Park, PA, USA ; Udayakumar, K.R. ; Cross, L.E.

Sol-gel-derived ferroelectric thin films of PZT (lead zirconate titanate) and PLZT (lead lanthanum zirconate titanate) have been successfully processed using internal heating with microwave energy. Pyrolysis and crystallization of films in the microwave field were fast, and showed good selectivity. The nature of xerogel plays an important role in the pyrolysis and crystallization of these films because of good coupling of the microwaves with these dipole-containing species. The microwave-processed films exhibit respectable dielectric and ferroelectric properties

Published in:

Applications of Ferroelectrics, 1992. ISAF '92., Proceedings of the Eighth IEEE International Symposium on

Date of Conference:

30 Aug-2 Sep 1992