By Topic

The use of STADIUM statistical TCAD simulation methodology in industrial environments

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Sanders, T.J. ; Dept. of Electr. & Comput. Eng., Florida Inst. of Technol., Melbourne, FL, USA ; Shahsavari, M.M. ; Means, D.P.

The software program called STADIUM has been developed by researchers at Florida Institute of Technology. The purpose of STADIUM is to facilitate the statistical design and simulation of integrated processes, devices and products. It is a software shell which uses existing simulators in a design of experiments statistical methodology, and which allows the estimation of the statistical response of the manufacturing environment. Some of the details of STADIUM are described together with activities of the Florida SEMATECH Center of Excellence to implement this software in several industrial environments

Published in:

University/Government/Industry Microelectronics Symposium, 1993., Proceedings of the Tenth Biennial

Date of Conference:

18-19 May 1993