By Topic

Electrothermal microactuators based on dielectric loss heating

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

2 Author(s)
B. Rashidian ; Sch. of Electr. Eng., Georgia Inst. of Technol., Atlanta, GA, USA ; M. G. Allen

A method for microactuation based on excitation using the heat generated as a result of dielectric loss of materials at high frequencies is presented. This concept has been realized by fabricating electrothermal microactuators, composed of a layer of the copolymer of vinylidene fluoride and trifluoroethylene (PVDF-TrFE), on top of polyimide, using a fully integrated, self-aligned process. These actuators show larger deflection per unit temperature rise than conventional resistively heated electrothermal microactuators due to the properties of the materials used. In addition, they are easy to fabricate, can be remotely excited, and are capable of underwater operation. The actuation mechanism has been verified and a simplified model as well as a finite-element model have been developed. The measured values are in good agreement with those predicted by the model

Published in:

Micro Electro Mechanical Systems, 1993, MEMS '93, Proceedings An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems. IEEE.

Date of Conference:

7-10 Feb 1993