By Topic

Viscous damping model for laterally oscillating microstructures

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Young-Ho Cho ; Mech. Eng. Res. Inst., Korea Adv. Inst. of Sci. & Technol., Seoul, South Korea ; Pisano, A.P. ; Howe, R.T.

Viscous energy loss in oscillating fluid-film dampers that provide frictional shear for laterally-driven planar microstructures is investigated. It is found that Stokes-type fluid motion models viscous damping more accurately than Couette-type flow field. This paper characterizes the damping property of a fluid layer in terms of viscous energy dissipation, then derives analytic damping formulae for practical Q estimation. Theoretical Q-factors are compared to the experimental values, measured from surface-micromachined polysilicon resonators. Data reported by previous investigators are also analyzed and compared. The experimental results indicate that the Stokes-type damping model presents a more general damping treatment with better Q estimation, although discrepancies of 10 to 20% still remain between the estimated and measured Q

Published in:

Microelectromechanical Systems, Journal of  (Volume:3 ,  Issue: 2 )