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Fabricating biomedical sensors with thin-film technology

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5 Author(s)
Neuman, M.R. ; Case Western Reserve Univ., Cleveland, OH, USA ; Buck, R.P. ; Cosofret, V.V. ; Lindner, E.
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Reviews some of the different chemical and physical sensor structures that have been fabricated using thin- and thick-film technology. Individual reports referenced in this article describe the details of the sensor designs and give calibration characteristics and applications. This article illustrates the wide variety of sensors that are possible using thin- and thick-film microelectronic technology. It by no means exhausts the possibilities of what can be done, since only a few materials and applications have been considered. It does, however, point out the great versatility of this type of processing, and sensors fabricated using these microelectronic processes require far less capital expenditure than when full silicon technology is employed.<>

Published in:

Engineering in Medicine and Biology Magazine, IEEE  (Volume:13 ,  Issue: 3 )