Cart (Loading....) | Create Account
Close category search window
 

Passive integrated-optical waveguide structures by Ge-diffusion in silicon

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Schmidtchen, J. ; Inst. fur Hochfrequenztech., Tech. Univ. Berlin, Germany ; Schuppert, Bernd ; Petermann, K.

The realization of low loss optical channel waveguides and passive waveguide structures by a germanium indiffusion process into silicon will be discussed. Employing relatively simple technological processing like standard lithography, e-beam evaporation and diffusion, single-mode waveguides could be produced exhibiting polarization independent losses of as low as 0.3 dB/cm at wavelengths of λ=1.3 μm and λ=1.55 μm. S-bends fabricated with the same technology offered an excess loss of 1 dB at a radius of around 5 mm without any optimization. For a Y-junction designed with S-bends the maximum opening angle was determined to be 1.8° if an excess loss of 1 dB is allowed. The examination of directional couplers with various coupling lengths and distances revealed an excellent agreement between measurement and theory

Published in:

Lightwave Technology, Journal of  (Volume:12 ,  Issue: 5 )

Date of Publication:

May 1994

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.