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Sputtering of high coercivity/low noise CoCrTa bilayered hard disks in a manufacturing system

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5 Author(s)
B. Cord ; Leybold AG, Hanau, Germany ; K. H. Schuller ; H. Zahel ; G. Chaput
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The magnetic properties and recording performance of mono- and symmetrically bilayered Cr-CoCrTa layer stacks are compared. The media coercivity changes drastically at thin intermediate Cr thicknesses d with a d-0.74 dependence between 1 and 5 nm and a monotonic increase at d greater than 5 nm. The media noise is reduced by 4-5 dB at very thin intermediate Cr, the M-H loop is square and PW50 values are the same for mono- and bilayered films. The stability of the process was investigated and the manufacturing of disks was demonstrated in a production sputtering system

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IEEE Transactions on Magnetics  (Volume:29 ,  Issue: 6 )