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The effect of annealing on moment density and phase formations in Fe-N films

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2 Author(s)
C. Gao ; Alabama Univ., Tuscaloosa, AL ; M. Shamsuzzoha

Fe-N films are prepared by argon-nitrogen reactive RF sputtering at a total pressure of 6 mTorr, an argon flow rate of 100 standard cubic centimeters per minute (sccm) and a nitrogen flow rate R of 0 to 30 sccm. For R⩽15 sccm, little changes in phase structure and moment (Δσ⩽6%) are seen for annealing temperatures TA⩽300°C. Above 300°C, changes in the phase structure and moment (Δσs⩾12%) are observed. For R=30 sccm, no phase changes are observed at all annealing temperatures and the moment is found to be constant (Δσs⩽5%). The phases observed by X-ray and transmission electron diffraction depend on R and include α-Fe(N), Fe16N2 and Fe4N. These data could be correlated with the moment. The Curie temperature of Fe4N is 480~510°C, in good agreement with previous result

Published in:

IEEE Transactions on Magnetics  (Volume:29 ,  Issue: 6 )