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High-speed integrated circuit probing using a scanning force microscope sampler

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3 Author(s)
Ho, F. ; Edward L. Ginzton Lab., Stanford Univ., CA ; Hou, A.S. ; Bloom, D.M.

Using a scanning force microscope as a high-speed all-electrical sampler, the authors have probed voltages on internal nodes of integrated circuits. The authors have demonstrated non-invasive probing through a passivating layer and probing of an Intel 80486 microprocessor

Published in:

Electronics Letters  (Volume:30 ,  Issue: 7 )

Date of Publication:

31 Mar 1994

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