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Fabrication, characterization, and analysis of zinc-diffused GaAs waveguides

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6 Author(s)
T. Touam ; Dept. of Eng. Phys., Ecole Polytech., Montreal, Que., Canada ; C. Wu ; Y. Gigase ; M. Belanger
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GaAs planar channel waveguides fabricated with diffused boundaries using a zinc-doped spin-on-glass source are discussed. Low loss (~1.9 dB/cm) single-mode waveguides are achieved. Modal properties of the waveguides are experimentally investigated. A simple model is used to analyze the waveguides.

Published in:

IEEE Journal of Quantum Electronics  (Volume:25 ,  Issue: 5 )