Cart (Loading....) | Create Account
Close category search window

In situ measurement of internal stress distribution in Fe/Al multi-layered films during formation

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

2 Author(s)
Kubota, K. ; Dept. of Phys. Electron., Tokyo Inst. of Technol., Japan ; Naoe, M.

In situ measurement of internal stress distribution in Fe/Al multilayered films was made by detecting the curvature of substrates during deposition. When the Al layer was deposited on the Fe layer, a large curvature of the substrate corresponding to the compressive stress in the films was detected. On the other hand, tensile stress appeared when the Fe layer was deposited on the Al layer, and the internal stress became compressive stress after the thickness of Fe layer exceed 10 Å. Mica sheets with thickness of 0.02 mm and a He-Ne laser were used as substrates and light source, respectively, in order to detect the curvature of the substrates during deposition of the Fe/Al multilayered films

Published in:

Magnetics, IEEE Transactions on  (Volume:27 ,  Issue: 6 )

Date of Publication:

Nov 1991

Need Help?

IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.