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Multi-dimensional detection of magnetic fields using CMOS integrated sensors

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2 Author(s)
Paranjape, M. ; Dept. of Electr. Eng., Alberta Univ., Edmonton, Alta., Canada ; Ristic, Lj.

Silicon sensors which are capable of detecting the two in-plane components of magnetic field, as well as all three components of the magnetic field vector, are presented. The devices under consideration are based on integrating a Hall plate within a silicon substrate. The sensors have been fabricated in both an n-substrate and a p-well using a commercially available standard CMOS process. The results for the two-dimensional magnetic field sensors exhibit a linear response to an applied field and therefore provide the impetus for the development of a 3-D sensor structure

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Magnetics, IEEE Transactions on  (Volume:27 ,  Issue: 6 )