Cart (Loading....) | Create Account
Close category search window
 

Two-dimensional, self-consistent, three-moment simulation of RF glow discharge

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

2 Author(s)
Young, Fongray Frank ; Dept. of Electr. Eng., Auburn Univ., AL, USA ; Wu, C.-H.J.

A two-dimensional self-consistent nonequilibrium fluid model is used to simulate radio frequency (RF) glow discharges to evaluate the quantitative effects of the radial and axial flow dynamics inside a cylindrically symmetric parallel-plate geometry. This model is based on the three moments of the Boltzmann equation and on Poisson's equation. Radial/axial flow dynamics of plasma in low-pressure parallel plate RF glow discharges are investigated. Instead of uniform profiles along the radial direction, which are assumed in one-dimensional models, nonplate profiles are obtained from the two-dimensional simulations. Ionization rate and three moment distributions of plasma density, average velocity, and mean energy are presented in a two-dimensional configuration. The maximum ionization rate occurs in the radial sheath region and agrees with experimental results. Variations in ion density distributions at different positions, various gas pressures frequencies, and applied fields are discussed

Published in:

Plasma Science, IEEE Transactions on  (Volume:21 ,  Issue: 3 )

Date of Publication:

Jun 1993

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.