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Two-dimensional, self-consistent, three-moment simulation of RF glow discharge

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2 Author(s)
Young, Fongray Frank ; Dept. of Electr. Eng., Auburn Univ., AL, USA ; Wu, C.-H.J.

A two-dimensional self-consistent nonequilibrium fluid model is used to simulate radio frequency (RF) glow discharges to evaluate the quantitative effects of the radial and axial flow dynamics inside a cylindrically symmetric parallel-plate geometry. This model is based on the three moments of the Boltzmann equation and on Poisson's equation. Radial/axial flow dynamics of plasma in low-pressure parallel plate RF glow discharges are investigated. Instead of uniform profiles along the radial direction, which are assumed in one-dimensional models, nonplate profiles are obtained from the two-dimensional simulations. Ionization rate and three moment distributions of plasma density, average velocity, and mean energy are presented in a two-dimensional configuration. The maximum ionization rate occurs in the radial sheath region and agrees with experimental results. Variations in ion density distributions at different positions, various gas pressures frequencies, and applied fields are discussed

Published in:

Plasma Science, IEEE Transactions on  (Volume:21 ,  Issue: 3 )

Date of Publication:

Jun 1993

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