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Novel stationary-sample atomic force microscope with beam-tracking lens

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2 Author(s)
Jung, P.S. ; AT Corp., Mesa, AZ, USA ; Yaniv, D.R.

An atomic force microscope with a stationary sample and a scanning cantilever using an optical lever method is demonstrated for the first time. The cantilever tip is translated to measure surface profiles while a simple lens attached to the cantilever holder guides a focused beam from a fixed collimated diode laser. The imaging capability is demonstrated up to 100*100 mu m2.

Published in:

Electronics Letters  (Volume:29 ,  Issue: 3 )