Low loss single-mode optical waveguides with large cross-section in standard epitaxial silicon

Single-mode waveguides, well matched to the fiber spot size, have been fabricated by chemical etching of standard epitaxial silicon. Analytical estimations for the waveguide attenuation are given. Measured waveguide losses below 1.5 dB/cm have been obtained at both wavelengths, /spl lambda/=1.3 μm and /spl lambda/=1.55 μm.