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Failure analysis of ULSI circuits using photon emission

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4 Author(s)
Uraoka, Y. ; Matsushita Electr. Ind. Co. Ltd., Osaka, Japan ; Miyanaga, I. ; Tsuji, K. ; Akiyama, S.

A real-time failure analysis technique for ULSI circuits using photon emission is proposed. This technique utilizes a photon detection system combined with a circuit tester. Improved failure detection is achieved because the tester can bias arbitrary blocks in the ULSI chip. Detecting and correct process defects and design errors improves the reliability of the ULSI chip

Published in:

Semiconductor Manufacturing, IEEE Transactions on  (Volume:6 ,  Issue: 4 )

Date of Publication:

Nov 1993

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